Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11742200 | Composition and methods using same for carbon doped silicon containing films | Xinjian Lei, Anupama Mallikarjunan, Moo-Sung Kim | 2023-08-29 |
| 11725111 | Compositions and processes for depositing carbon-doped silicon-containing films | Manchao Xiao, Xinjian Lei, Ronald Martin Pearlstein, Eugene Joseph Karwacki, Jr., Bing Han +1 more | 2023-08-15 |
| 11649547 | Deposition of carbon doped silicon oxide | Meiliang Wang, Xinjian Lei, Matthew R. MacDonald | 2023-05-16 |