Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11742200 | Composition and methods using same for carbon doped silicon containing films | Haripin Chandra, Xinjian Lei, Anupama Mallikarjunan | 2023-08-29 |
| 11732351 | Methods for depositing a conformal metal or metalloid silicon nitride film and resultant films | Xinjian Lei, Jianheng Li | 2023-08-22 |
| 11631580 | Formulation for deposition of silicon doped hafnium oxide as ferroelectric materials | Xinjian Lei, Matthew R. MacDonald, Se Won Lee | 2023-04-18 |
| 11605535 | Boron-containing compounds, compositions, and methods for the deposition of a boron containing films | Xinjian Lei | 2023-03-14 |