Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11732351 | Methods for depositing a conformal metal or metalloid silicon nitride film and resultant films | Xinjian Lei, Moo-Sung Kim | 2023-08-22 |
| 11670722 | Process to reduce plasma induced damage | Lai ZHAO, Yujia Zhai, Soo Young Choi | 2023-06-06 |