Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11702743 | Trisilylamine derivatives as precursors for high growth rate silicon-containing films | Xinjian Lei, Meiliang Wang | 2023-07-18 |
| 11649547 | Deposition of carbon doped silicon oxide | Meiliang Wang, Xinjian Lei, Haripin Chandra | 2023-05-16 |
| 11631580 | Formulation for deposition of silicon doped hafnium oxide as ferroelectric materials | Xinjian Lei, Moo-Sung Kim, Se Won Lee | 2023-04-18 |
| 11591692 | Organoamino-polysiloxanes for deposition of silicon-containing films | Xinjian Lei, Manchao Xiao, Daniel P. Spence, Meiliang Wang, Suresh K. Rajaraman | 2023-02-28 |
| 11584854 | Compositions and methods for the deposition of silicon oxide films | Xinjian Lei, Meiliang Wang, Richard Ho, Manchao Xiao, Suresh K. Rajaraman | 2023-02-21 |