Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11735413 | Precursors and flowable CVD methods for making low-k films to fill surface features | Manchao Xiao, Daniel P. Spence | 2023-08-22 |
| 11584854 | Compositions and methods for the deposition of silicon oxide films | Xinjian Lei, Meiliang Wang, Matthew R. MacDonald, Manchao Xiao, Suresh K. Rajaraman | 2023-02-21 |