Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11713328 | Stable alkenyl or alkynyl-containing organosilicon precursor compositions | Robert Gordon Ridgeway, Raymond Nicholas Vrtis, Xinjian Lei, Madhukar Bhaskara Rao, Steven Gerard Mayorga +2 more | 2023-08-01 |
| 11702743 | Trisilylamine derivatives as precursors for high growth rate silicon-containing films | Xinjian Lei, Matthew R. MacDonald | 2023-07-18 |
| 11649547 | Deposition of carbon doped silicon oxide | Xinjian Lei, Haripin Chandra, Matthew R. MacDonald | 2023-05-16 |
| 11626279 | Compositions and methods for making silicon containing films | Anupama Mallikarjunan, Andrew David Johnson, Raymond Nicholas Vrtis, Bing Han, Xinjian Lei +1 more | 2023-04-11 |
| 11591692 | Organoamino-polysiloxanes for deposition of silicon-containing films | Xinjian Lei, Manchao Xiao, Matthew R. MacDonald, Daniel P. Spence, Suresh K. Rajaraman | 2023-02-28 |
| 11584854 | Compositions and methods for the deposition of silicon oxide films | Xinjian Lei, Matthew R. MacDonald, Richard Ho, Manchao Xiao, Suresh K. Rajaraman | 2023-02-21 |