Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11851756 | Methods for depositing silicon-containing films | Ming Li, Xinjian Lei, Raymond Nicholas Vrtis, Robert Gordon Ridgeway | 2023-12-26 |
| 11735413 | Precursors and flowable CVD methods for making low-k films to fill surface features | Daniel P. Spence, Richard Ho | 2023-08-22 |
| 11725111 | Compositions and processes for depositing carbon-doped silicon-containing films | Xinjian Lei, Ronald Martin Pearlstein, Haripin Chandra, Eugene Joseph Karwacki, Jr., Bing Han +1 more | 2023-08-15 |
| 11713328 | Stable alkenyl or alkynyl-containing organosilicon precursor compositions | Robert Gordon Ridgeway, Raymond Nicholas Vrtis, Xinjian Lei, Madhukar Bhaskara Rao, Steven Gerard Mayorga +2 more | 2023-08-01 |
| 11591692 | Organoamino-polysiloxanes for deposition of silicon-containing films | Xinjian Lei, Matthew R. MacDonald, Daniel P. Spence, Meiliang Wang, Suresh K. Rajaraman | 2023-02-28 |
| 11584854 | Compositions and methods for the deposition of silicon oxide films | Xinjian Lei, Meiliang Wang, Matthew R. MacDonald, Richard Ho, Suresh K. Rajaraman | 2023-02-21 |