Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11735413 | Precursors and flowable CVD methods for making low-k films to fill surface features | Manchao Xiao, Richard Ho | 2023-08-22 |
| 11591692 | Organoamino-polysiloxanes for deposition of silicon-containing films | Xinjian Lei, Manchao Xiao, Matthew R. MacDonald, Meiliang Wang, Suresh K. Rajaraman | 2023-02-28 |