Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11517941 | Substrate processing method and substrate processing apparatus | Katsuya Akiyama | 2022-12-06 |
| 11501984 | Substrate processing device and substrate processing method | — | 2022-11-15 |
| 11413662 | Substrate cleaning apparatus and substrate cleaning method | Ayumi HIGUCHI, Naoko Yamaguchi | 2022-08-16 |
| 11404292 | Substrate processing method and substrate processing apparatus | Manabu OKUTANI, Hiroshi Abe, Shuichi Yasuda, Yasunori Kanematsu, Hitoshi Nakai | 2022-08-02 |
| 11342190 | Substrate processing apparatus and substrate processing method | Tomonori Fujiwara, Nobuyuki Shibayama, Tetsuya Shibata, Akiyoshi Nakano | 2022-05-24 |
| 11260431 | Substrate processing method and substrate processing apparatus | Manabu OKUTANI, Shuichi Yasuda, Yasunori Kanematsu, Dai Ueda, Song Zhang +2 more | 2022-03-01 |