Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404292 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Manabu OKUTANI, Hiroshi Abe, Yasunori Kanematsu, Hitoshi Nakai | 2022-08-02 |
| 11387910 | Optical module, transmission device, and operating point control method | Tamotsu Akashi | 2022-07-12 |
| 11260431 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Manabu OKUTANI, Yasunori Kanematsu, Dai Ueda, Song Zhang +2 more | 2022-03-01 |