Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11469117 | Substrate processing apparatus, and substrate processing method | Hitoshi Nakai, Manabu OKUTANI | 2022-10-11 |
| 11404292 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Manabu OKUTANI, Hiroshi Abe, Shuichi Yasuda, Hitoshi Nakai | 2022-08-02 |
| 11260431 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Manabu OKUTANI, Shuichi Yasuda, Dai Ueda, Song Zhang +2 more | 2022-03-01 |