Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11469117 | Substrate processing apparatus, and substrate processing method | Yasunori Kanematsu, Manabu OKUTANI | 2022-10-11 |
| 11404292 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Manabu OKUTANI, Hiroshi Abe, Shuichi Yasuda, Yasunori Kanematsu | 2022-08-02 |
| 11302525 | Substrate processing method and substrate processing apparatus | Manabu OKUTANI, Hiroaki Takahashi, Masayuki OTSUJI, Hiroshi Abe, Chikara MAEDA +1 more | 2022-04-12 |