Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11443960 | Substrate processing apparatus and substrate processing method | — | 2022-09-13 |
| 11417513 | Substrate processing method and substrate processing apparatus | Hiroaki Takahashi, Masahiko Kato, Yu YAMAGUCHI, Yuta SASAKI | 2022-08-16 |
| 11373860 | Method of restoring collapsed pattern, substrate processing method, and substrate processing device | — | 2022-06-28 |
| 11328925 | Substrate drying method and substrate processing apparatus | Yuta SASAKI, Hiroaki Takahashi | 2022-05-10 |
| 11302525 | Substrate processing method and substrate processing apparatus | Manabu OKUTANI, Hiroaki Takahashi, Hiroshi Abe, Chikara MAEDA, Hitoshi Nakai +1 more | 2022-04-12 |