Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11417513 | Substrate processing method and substrate processing apparatus | Masayuki OTSUJI, Hiroaki Takahashi, Yu YAMAGUCHI, Yuta SASAKI | 2022-08-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11417513 | Substrate processing method and substrate processing apparatus | Masayuki OTSUJI, Hiroaki Takahashi, Yu YAMAGUCHI, Yuta SASAKI | 2022-08-16 |