Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11417513 | Substrate processing method and substrate processing apparatus | Masayuki OTSUJI, Hiroaki Takahashi, Masahiko Kato, Yu YAMAGUCHI | 2022-08-16 |
| 11391235 | Engine system | Takashi Kaminaga, Tatsuya Fujikawa, Masahisa Yamakawa, Naoya Ito, Ryohei Matsuo +3 more | 2022-07-19 |
| 11392917 | Article reading device | Hidehiro Naitou, Hitoshi Iizaka, Hidehiko Miyakoshi, Yuichiro Hatanaka | 2022-07-19 |
| 11328925 | Substrate drying method and substrate processing apparatus | Hiroaki Takahashi, Masayuki OTSUJI | 2022-05-10 |
| 11302525 | Substrate processing method and substrate processing apparatus | Manabu OKUTANI, Hiroaki Takahashi, Masayuki OTSUJI, Hiroshi Abe, Chikara MAEDA +1 more | 2022-04-12 |