Issued Patents 2022
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11524314 | Substrate processing method and substrate processing device | Hiroshi Abe, Takaaki ISHIZU | 2022-12-13 |
| 11469117 | Substrate processing apparatus, and substrate processing method | Yasunori Kanematsu, Hitoshi Nakai | 2022-10-11 |
| 11465167 | Substrate treatment apparatus | Hiroshi Abe, Takashi Ota, Naohiko YOSHIHARA | 2022-10-11 |
| 11404292 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Hiroshi Abe, Shuichi Yasuda, Yasunori Kanematsu, Hitoshi Nakai | 2022-08-02 |
| 11335587 | Substrate processing apparatus and substrate processing meihod | Takashi Ota, Hiroshi Abe | 2022-05-17 |
| 11302525 | Substrate processing method and substrate processing apparatus | Hiroaki Takahashi, Masayuki OTSUJI, Hiroshi Abe, Chikara MAEDA, Hitoshi Nakai +1 more | 2022-04-12 |
| 11289324 | Substrate treatment method and substrate treatment apparatus | — | 2022-03-29 |
| 11260431 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Shuichi Yasuda, Yasunori Kanematsu, Dai Ueda, Song Zhang +2 more | 2022-03-01 |
| 11217441 | Substrate treatment method and substrate treatment apparatus | Kenji Kobayashi | 2022-01-04 |