Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11342190 | Substrate processing apparatus and substrate processing method | Nobuyuki Shibayama, Yukifumi YOSHIDA, Tetsuya Shibata, Akiyoshi Nakano | 2022-05-24 |
| 11243862 | Data processing method, data processing apparatus, and recording medium with data processing program recorded thereon | Hideji NAOHARA, Yumiko Hirato, Atsushi Sonoda | 2022-02-08 |