Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11342190 | Substrate processing apparatus and substrate processing method | Tomonori Fujiwara, Nobuyuki Shibayama, Yukifumi YOSHIDA, Tetsuya Shibata | 2022-05-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11342190 | Substrate processing apparatus and substrate processing method | Tomonori Fujiwara, Nobuyuki Shibayama, Yukifumi YOSHIDA, Tetsuya Shibata | 2022-05-24 |