Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11342190 | Substrate processing apparatus and substrate processing method | Tomonori Fujiwara, Yukifumi YOSHIDA, Tetsuya Shibata, Akiyoshi Nakano | 2022-05-24 |
| 11217452 | Substrate processing device and substrate processing method for carrying out chemical treatment for substrate | Kenji IZUMOTO | 2022-01-04 |