Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11517941 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA | 2022-12-06 |
| 11331625 | Gas treatment method and gas treatment apparatus | Akira Kishimoto, Hiroshi Machida, Tsuyoshi Yamaguchi, Takehiro Esaki, Koyo Norinaga | 2022-05-17 |