Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11413662 | Substrate cleaning apparatus and substrate cleaning method | Yukifumi YOSHIDA, Naoko Yamaguchi | 2022-08-16 |
| 11410853 | Substrate processing method and substrate processing device | Yuya AKANISHI | 2022-08-09 |
| 11260436 | Substrate processing apparatus and substrate processing method | Naoyuki Osada, Takahiro Yamaguchi, Eri Fujita, Akihisa IWASAKI, Shota IWAHATA | 2022-03-01 |
| 11217461 | Substrate processing device | — | 2022-01-04 |