Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11260436 | Substrate processing apparatus and substrate processing method | Naoyuki Osada, Takahiro Yamaguchi, Eri Fujita, Akihisa IWASAKI, Ayumi HIGUCHI | 2022-03-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11260436 | Substrate processing apparatus and substrate processing method | Naoyuki Osada, Takahiro Yamaguchi, Eri Fujita, Akihisa IWASAKI, Ayumi HIGUCHI | 2022-03-01 |