Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11520358 | Gas-pulsing-based shared precursor distribution system and methods of use | Michael R. Rice, Sanjeev Baluja, Ashley M. Okada, Alexander Fernandez, Ming Xu +4 more | 2022-12-06 |
| 11479855 | Spatial wafer processing with improved temperature uniformity | Sanjeev Baluja, Dhritiman Subha Kashyap, Jared Ahmad Lee, Tejas Ulavi, Michael R. Rice | 2022-10-25 |
| 11396703 | Apparatus and methods for improving chemical utilization rate in deposition process | Kevin Griffin, Sanjeev Baluja, Mario David Silvetti, Hari Ponnekanti | 2022-07-26 |
| 11220747 | Complementary pattern station designs | Sanjeev Baluja, Michael R. Rice, Arkaprava Dan, Hanhong Chen | 2022-01-11 |