Issued Patents 2022
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11511388 | Polishing system with support post and annular platen or polishing pad | Paul D. Butterfield, Thomas H. Osterheld, Shou-Sung Chang, Steven M. Zuniga, Fred C. Redeker | 2022-11-29 |
| 11508563 | Methods and apparatus for processing a substrate using improved shield configurations | Soundarrajan JEMBULINGAM, Jian J. Chen | 2022-11-22 |
| 11469080 | Magnetron assembly having coolant guide for enhanced target cooling | Dinkesh HUDERI SOMANNA, Brian T. West | 2022-10-11 |
| 11453099 | Retaining ring having inner surfaces with features | Steven Mark Reedy, Simon Yavelberg, Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu +1 more | 2022-09-27 |
| 11440159 | Edge load ring | Uday Pai, Van H. Nguyen | 2022-09-13 |
| 11400560 | Retaining ring design | Charles C. Garretson, Eric Lau, Andrew J. Nagengast, Steven M. Zuniga, Edwin C. Suarez +2 more | 2022-08-02 |
| 11370079 | Reinforcement ring for carrier head with flexible membrane | Jamie Stuart Leighton | 2022-06-28 |
| 11338409 | Three-zone carrier head and flexible membrane | Jamie Stuart Leighton | 2022-05-24 |
| 11260500 | Retaining ring with shaped surface | Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more | 2022-03-01 |
| 11241769 | Methods and apparatus for profile and surface preparation of retaining rings utilized in chemical mechanical polishing processes | David Masayuki Ishikawa, Garrett H. Sin, Charles C. Garretson, Huanbo Zhang, Chia-Ling PAI +2 more | 2022-02-08 |