Issued Patents 2022
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11499666 | Precision dynamic leveling mechanism with long motion capability | Michael Paul Rohrer, Tuan Nguyen | 2022-11-15 |
| 11476135 | Robot for simultaneous substrate transfer | Charles T. Carlson, Luke Bonecutter, David Blahnik | 2022-10-18 |
| 11443973 | Robot for simultaneous substrate transfer | Luke Bonecutter, Charles T. Carlson, Rajkumar Thanu, Karuppasamy Muthukamatchi, Jeff Hudgens +1 more | 2022-09-13 |
| 11434569 | Ground path systems for providing a shorter and symmetrical ground path | Tuan Nguyen, Edward P. Hammond, IV, David Blahnik, Tejas Ulavi, Amit Kumar BANSAL +3 more | 2022-09-06 |
| 11355367 | Robot for simultaneous substrate transfer | Charles T. Carlson, Luke Bonecutter, David Blahnik, Karuppasamy Muthukamatchi, Jeff Hudgens +1 more | 2022-06-07 |
| 11315806 | Batch heating and cooling chamber or loadlock | Robert Brent Vopat, Paul E. Pergande, Benjamin B. Riordon, David Blahnik, William T. Weaver | 2022-04-26 |
| 11264258 | Buffer chamber wafer heating mechanism and supporting robots | William T. Weaver, Robert Brent Vopat, David Blahnik, Benjamin B. Riordon, Paul E. Pergande | 2022-03-01 |