Issued Patents 2022
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D973609 | Upper shield with showerhead for a process chamber | Sarath Babu, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Kang Zhang +1 more | 2022-12-27 |
| D971167 | Lower shield for a substrate processing chamber | Sarath Babu, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Yuichi Wada +1 more | 2022-11-29 |
| 11476097 | Common electrostatic chuck for differing substrates | Vinodh Ramachandran, Sarath Babu | 2022-10-18 |
| D967081 | Microwave transmission window assembly | Rajesh Kumar Putti, Prashant Agarwal | 2022-10-18 |
| 11375584 | Methods and apparatus for processing a substrate using microwave energy | Tuck Foong Koh, Yueh Sheng Ow, Nuno Yen-Chu Chen, Preetham Rao | 2022-06-28 |
| 11362404 | Microwave window including first and second plates with vertical stepped areas configured for pressure sealing a dielectric plate between the first and second plates | Rajesh Kumar Putti, Prashant Agarwal | 2022-06-14 |
| 11361981 | Batch substrate support with warped substrate capability | Shashidhara Patel, Ribhu Gautam | 2022-06-14 |
| 11328929 | Methods, apparatuses and systems for substrate processing for lowering contact resistance | Yueh Sheng Ow, Junqi Wei, Wen Long Favier Shoo, Takashi Shimizu, Kelvin Boh +1 more | 2022-05-10 |
| 11289357 | Methods and apparatus for high voltage electrostatic chuck protection | Yuichi Wada, Yueh Sheng Ow, Clinton GOH, Kai Liang Liew, Sarath Babu | 2022-03-29 |
| 11251028 | Pre-clean chamber with integrated shutter garage | Cheng-Hsiung Tsai, Sarath Babu, Manjunatha Koppa, Hiroyuki Takahama | 2022-02-15 |