Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10810733 | Defect classification apparatus and defect classification method | Naoaki KONDO, Takehiro Hirai, Minoru Harada | 2020-10-20 |
| 10783625 | Method for measuring overlay and measuring apparatus, scanning electron microscope, and GUI | Minoru Harada, Ryo Nakagaki, Fumihiko Fukunaga | 2020-09-22 |
| 10770260 | Defect observation device | Yuko Otani, Yohei Minekawa, Takashi Nobuhara, Nobuhiko KANZAKI, Takehiro Hirai +3 more | 2020-09-08 |
| 10720307 | Electron microscope device and inclined hole measurement method using same | Fumihiko Fukunaga, Yasunori Goto | 2020-07-21 |
| 10559074 | Sample observation device and sample observation method | Minoru Harada, Naoaki KONDO, Takehiro Hirai | 2020-02-11 |