Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10810733 | Defect classification apparatus and defect classification method | Naoaki KONDO, Takehiro Hirai, Yuji Takagi | 2020-10-20 |
| 10783625 | Method for measuring overlay and measuring apparatus, scanning electron microscope, and GUI | Ryo Nakagaki, Fumihiko Fukunaga, Yuji Takagi | 2020-09-22 |
| 10559074 | Sample observation device and sample observation method | Yuji Takagi, Naoaki KONDO, Takehiro Hirai | 2020-02-11 |