Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10783625 | Method for measuring overlay and measuring apparatus, scanning electron microscope, and GUI | Minoru Harada, Ryo Nakagaki, Yuji Takagi | 2020-09-22 |
| 10720307 | Electron microscope device and inclined hole measurement method using same | Yuji Takagi, Yasunori Goto | 2020-07-21 |
| 10712152 | Overlay error measurement device and computer program | — | 2020-07-14 |