Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811271 | Substrate processing device, manufacturing method for semiconductor device, and reaction tube | Hidenari Yoshida, Shigeru Odake, Takayuki Nakada | 2020-10-20 |
| 10689758 | Substrate processing apparatus, and method for manufacturing semiconductor device | Hidenari Yoshida, Takayuki Nakada | 2020-06-23 |
| 10636681 | Substrate processing apparatus and method of manufacturing semiconductor device | Daigi KAMIMURA, Takashi Nogami | 2020-04-28 |
| 10615061 | Substrate processing apparatus | Shuhei Saido, Hidenari Yoshida, Takatomo Yamaguchi, Takayuki Nakada | 2020-04-07 |
| 10590531 | Substrate processing apparatus, and method of manufacturing semiconductor device | Kenji Shirako | 2020-03-17 |
| 10550468 | Substrate processing apparatus | Takayuki Nakada, Kenji Shirako | 2020-02-04 |