Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811271 | Substrate processing device, manufacturing method for semiconductor device, and reaction tube | Hidenari Yoshida, Tomoshi Taniyama, Takayuki Nakada | 2020-10-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811271 | Substrate processing device, manufacturing method for semiconductor device, and reaction tube | Hidenari Yoshida, Tomoshi Taniyama, Takayuki Nakada | 2020-10-20 |