Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811271 | Substrate processing device, manufacturing method for semiconductor device, and reaction tube | Hidenari Yoshida, Shigeru Odake, Tomoshi Taniyama | 2020-10-20 |
| 10689758 | Substrate processing apparatus, and method for manufacturing semiconductor device | Hidenari Yoshida, Tomoshi Taniyama | 2020-06-23 |
| 10615061 | Substrate processing apparatus | Shuhei Saido, Hidenari Yoshida, Takatomo Yamaguchi, Tomoshi Taniyama | 2020-04-07 |
| 10550468 | Substrate processing apparatus | Tomoshi Taniyama, Kenji Shirako | 2020-02-04 |
| 10529605 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Daigi KAMIMURA | 2020-01-07 |