Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10837112 | Substrate processing apparatus | Yasuaki Komae, Takashi Nogami | 2020-11-17 |
| 10590531 | Substrate processing apparatus, and method of manufacturing semiconductor device | Tomoshi Taniyama | 2020-03-17 |
| 10550468 | Substrate processing apparatus | Takayuki Nakada, Tomoshi Taniyama | 2020-02-04 |