Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10837112 | Substrate processing apparatus | Yasuaki Komae, Kenji Shirako | 2020-11-17 |
| 10636681 | Substrate processing apparatus and method of manufacturing semiconductor device | Daigi KAMIMURA, Tomoshi Taniyama | 2020-04-28 |