Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10636681 | Substrate processing apparatus and method of manufacturing semiconductor device | Tomoshi Taniyama, Takashi Nogami | 2020-04-28 |
| 10529605 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Takayuki Nakada | 2020-01-07 |