Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10731254 | Protective plate, substrate processing apparatus, and method of manufacturing semiconductor device | Hidenari Yoshida, Yusaku OKAJIMA | 2020-08-04 |
| 10714362 | Substrate processing apparatus and method of manufacturing semiconductor device | — | 2020-07-14 |
| 10615061 | Substrate processing apparatus | Hidenari Yoshida, Takatomo Yamaguchi, Takayuki Nakada, Tomoshi Taniyama | 2020-04-07 |
| 10597780 | Substrate processing apparatus, heater and method of manufacturing semiconductor device | Hitoshi Murata, Takashi Yahata, Yuichi Wada, Takatomo Yamaguchi | 2020-03-24 |
| 10593572 | Substrate processing apparatus and method of manufacturing semiconductor device | — | 2020-03-17 |
| 10573535 | Substrate processing apparatus, lid cover and method of manufacturing semiconductor device | Mika Urushihara, Yusaku OKAJIMA | 2020-02-25 |
| D872037 | Cover of seal cap for reaction chamber for semiconductor manufacturing | Yusaku OKAJIMA, Hidenari Yoshida, Takafumi Sasaki | 2020-01-07 |