Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10677830 | Methods and apparatus for detecting microwave fields in a cavity | Ananthkrishna Jupudi, Yueh Sheng Ow, Jacob Newman, Preetham Rao, Vinodh Ramachandran | 2020-06-09 |
| 10604839 | Substrate processing apparatus, method of manufacturing semiconductor device, and method of processing substrate | Tetsuaki INADA, Mitsunori Ishisaka, Mitsuhiro Hirano, Sadayoshi Horii, Hideharu Itatani +2 more | 2020-03-31 |
| 10597780 | Substrate processing apparatus, heater and method of manufacturing semiconductor device | Hitoshi Murata, Takashi Yahata, Takatomo Yamaguchi, Shuhei Saido | 2020-03-24 |