Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10714316 | Method of manufacturing semiconductor device | Tsukasa Kamakura, Kazuhiro Morimitsu, Eisuke Nishitani, Shun MATSUI | 2020-07-14 |
| 10604839 | Substrate processing apparatus, method of manufacturing semiconductor device, and method of processing substrate | Tetsuaki INADA, Yuichi Wada, Mitsunori Ishisaka, Mitsuhiro Hirano, Sadayoshi Horii +2 more | 2020-03-31 |