Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10604839 | Substrate processing apparatus, method of manufacturing semiconductor device, and method of processing substrate | Tetsuaki INADA, Yuichi Wada, Mitsunori Ishisaka, Mitsuhiro Hirano, Hideharu Itatani +2 more | 2020-03-31 |