Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847392 | Method of manufacturing semiconductor device | — | 2020-11-24 |
| 10808318 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Takeo Hanashima, Takafumi Sasaki, Hidenari Yoshida | 2020-10-20 |
| 10784116 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Koei KURIBAYASHI, Daigo YAMAGUCHI | 2020-09-22 |
| 10714316 | Method of manufacturing semiconductor device | Kazuhiro Morimitsu, Hideharu Itatani, Eisuke Nishitani, Shun MATSUI | 2020-07-14 |
| 10671056 | Substrate processing system | Masanori NAKAYAMA | 2020-06-02 |
| 10655218 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | — | 2020-05-19 |