Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10808318 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Tsukasa Kamakura, Takafumi Sasaki, Hidenari Yoshida | 2020-10-20 |
| 10640872 | Substrate processing apparatus and method of manufacturing semiconductor device | Mikio Ohno, Atsushi UMEKAWA, Hiroaki Hiramatsu | 2020-05-05 |