Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D901406 | Inner tube of reactor for semiconductor fabrication | Toru Kagaya | 2020-11-10 |
| 10684174 | Substrate processing apparatus, and thermocouple | Akihiro Osaka, Hideto Yamaguchi, Tetsuya Kosugi, Tokunobu Akao, Motoya Takewaki | 2020-06-16 |
| 10640872 | Substrate processing apparatus and method of manufacturing semiconductor device | Mikio Ohno, Takeo Hanashima, Hiroaki Hiramatsu | 2020-05-05 |