Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D901406 | Inner tube of reactor for semiconductor fabrication | Atsushi UMEKAWA | 2020-11-10 |
| D889596 | Gas nozzle for substrate processing apparatus | Yusaku OKAJIMA, Hiroaki Hiramatsu, Shinya Ebata | 2020-07-07 |
| D888196 | Gas nozzle for substrate processing apparatus | Yusaku OKAJIMA, Hiroaki Hiramatsu, Shinya Ebata | 2020-06-23 |