Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D889596 | Gas nozzle for substrate processing apparatus | Yusaku OKAJIMA, Toru Kagaya, Shinya Ebata | 2020-07-07 |
| D888196 | Gas nozzle for substrate processing apparatus | Yusaku OKAJIMA, Toru Kagaya, Shinya Ebata | 2020-06-23 |
| 10640872 | Substrate processing apparatus and method of manufacturing semiconductor device | Mikio Ohno, Atsushi UMEKAWA, Takeo Hanashima | 2020-05-05 |
| 10584419 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masahito Kitamura, Tetsuya Takahashi | 2020-03-10 |