Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D889596 | Gas nozzle for substrate processing apparatus | Yusaku OKAJIMA, Toru Kagaya, Hiroaki Hiramatsu | 2020-07-07 |
| D888196 | Gas nozzle for substrate processing apparatus | Yusaku OKAJIMA, Toru Kagaya, Hiroaki Hiramatsu | 2020-06-23 |