Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10731254 | Protective plate, substrate processing apparatus, and method of manufacturing semiconductor device | Shuhei Saido, Hidenari Yoshida | 2020-08-04 |
| D889596 | Gas nozzle for substrate processing apparatus | Toru Kagaya, Hiroaki Hiramatsu, Shinya Ebata | 2020-07-07 |
| D888196 | Gas nozzle for substrate processing apparatus | Toru Kagaya, Hiroaki Hiramatsu, Shinya Ebata | 2020-06-23 |
| 10573535 | Substrate processing apparatus, lid cover and method of manufacturing semiconductor device | Shuhei Saido, Mika Urushihara | 2020-02-25 |
| D872037 | Cover of seal cap for reaction chamber for semiconductor manufacturing | Hidenari Yoshida, Shuhei Saido, Takafumi Sasaki | 2020-01-07 |