Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10808318 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Takeo Hanashima, Tsukasa Kamakura, Takafumi Sasaki | 2020-10-20 |
| 10811271 | Substrate processing device, manufacturing method for semiconductor device, and reaction tube | Shigeru Odake, Tomoshi Taniyama, Takayuki Nakada | 2020-10-20 |
| 10731254 | Protective plate, substrate processing apparatus, and method of manufacturing semiconductor device | Shuhei Saido, Yusaku OKAJIMA | 2020-08-04 |
| 10689758 | Substrate processing apparatus, and method for manufacturing semiconductor device | Tomoshi Taniyama, Takayuki Nakada | 2020-06-23 |
| 10615061 | Substrate processing apparatus | Shuhei Saido, Takatomo Yamaguchi, Takayuki Nakada, Tomoshi Taniyama | 2020-04-07 |
| D872037 | Cover of seal cap for reaction chamber for semiconductor manufacturing | Yusaku OKAJIMA, Shuhei Saido, Takafumi Sasaki | 2020-01-07 |