Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10615061 | Substrate processing apparatus | Shuhei Saido, Hidenari Yoshida, Takayuki Nakada, Tomoshi Taniyama | 2020-04-07 |
| 10597780 | Substrate processing apparatus, heater and method of manufacturing semiconductor device | Hitoshi Murata, Takashi Yahata, Yuichi Wada, Shuhei Saido | 2020-03-24 |