Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10597780 | Substrate processing apparatus, heater and method of manufacturing semiconductor device | Takashi Yahata, Yuichi Wada, Takatomo Yamaguchi, Shuhei Saido | 2020-03-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10597780 | Substrate processing apparatus, heater and method of manufacturing semiconductor device | Takashi Yahata, Yuichi Wada, Takatomo Yamaguchi, Shuhei Saido | 2020-03-24 |