Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10796934 | Substrate processing apparatus, method of manufacturing semiconductor device and electrode fixing part | Tsuyoshi Takeda, Tatsuya NISHINO | 2020-10-06 |
| 10633739 | Substrate processing apparatus | Yukitomo HIROCHI | 2020-04-28 |
| 10597780 | Substrate processing apparatus, heater and method of manufacturing semiconductor device | Hitoshi Murata, Yuichi Wada, Takatomo Yamaguchi, Shuhei Saido | 2020-03-24 |
| 10541170 | Substrate processing apparatus and method of manufacturing semiconductor device | Naofumi Ohashi, Shun MATSUI | 2020-01-21 |